Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472424 | Substrate processing apparatus and a method of manufacturing a semiconductor device | Katsuyoshi Hamano, Yasutoshi TSUBOTA, Masayuki Tomita | 2016-10-18 |
| 9236246 | Substrate processing apparatus and a method of manufacturing a semiconductor device | Katsuyoshi Hamano, Yasutoshi TSUBOTA, Masayuki Tomita | 2016-01-12 |