Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9518321 | Atomic layer deposition processing apparatus to reduce heat energy conduction | Mitsuro Tanabe, Kazuhiro Yuasa, Masanori Sakai, Yasutoshi TSUBOTA | 2016-12-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9518321 | Atomic layer deposition processing apparatus to reduce heat energy conduction | Mitsuro Tanabe, Kazuhiro Yuasa, Masanori Sakai, Yasutoshi TSUBOTA | 2016-12-13 |