Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460911 | Method of manufacturing semiconductor device and substrate processing method | Yoshiro Hirose, Atsushi Sano, Yugo Orihashi, Satoshi Shimamoto | 2016-10-04 |
| 9460916 | Method of manufacturing semiconductor device and substrate processing apparatus | Satoshi Shimamoto, Yugo Orihashi, Yoshiro Hirose | 2016-10-04 |