Issued Patents 2016
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9455137 | Method of manufacturing semiconductor device | Yoshiro Hirose, Yushin Takasawa, Tsukasa Kamakura, Yoshinobu Nakamura | 2016-09-27 |
| 9431236 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshinobu Nakamura | 2016-08-30 |
| 9412585 | Method of manufacturing a SiOCN film, substrate processing apparatus, and recording medium | Yoshinobu Nakamura | 2016-08-09 |
| 9394607 | Substrate processing apparatus | Masaya NISHIDA, Seiyo Nakashima, Tomoyasu Miyashita | 2016-07-19 |
| 9390911 | Method of manufacturing semiconductor device | Yoshiro Hirose, Yoshinobu Nakamura, Ryuji Yamamoto | 2016-07-12 |
| 9378943 | Method of manufacturing semiconductor device, method of processing substrate substrate processing apparatus and non-transitory computer-readable recording medium | Yoshiro Hirose, Yushin Takasawa, Tsukasa Kamakura, Yoshinobu Nakamura | 2016-06-28 |
| 9340872 | Cleaning method, manufacturing method of semiconductor device, substrate processing apparatus, and recording medium | Shintaro Kogura | 2016-05-17 |
| 9263253 | Method of manufacturing a SiOCN film, substrate processing apparatus, and recording medium | Yoshinobu Nakamura | 2016-02-16 |