Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9496134 | Substrate processing apparatus, method of manufacturing semiconductor device and semiconductor device | Shinya Sasaki, Yuji Takebayashi | 2016-11-15 |
| 9340872 | Cleaning method, manufacturing method of semiconductor device, substrate processing apparatus, and recording medium | Ryota Sasajima | 2016-05-17 |