Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9496134 | Substrate processing apparatus, method of manufacturing semiconductor device and semiconductor device | Shinya Sasaki, Shintaro Kogura | 2016-11-15 |
| 9437421 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Masakazu Shimada, Atsushi Morikawa | 2016-09-06 |