Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9508546 | Method of manufacturing semiconductor device | Kazuyuki Toyoda, Tadashi Takasaki, Hiroshi Ashihara, Atsushi Sano, Naonori Akae | 2016-11-29 |
| 9378991 | Substrate processing apparatus and substrate processing method | Akira Takahashi, Masakazu Sakata | 2016-06-28 |