Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9508546 | Method of manufacturing semiconductor device | Tadashi Takasaki, Hiroshi Ashihara, Atsushi Sano, Naonori Akae, Hidehiro Yanai | 2016-11-29 |
| 9502236 | Substrate processing apparatus, non-transitory computer-readable recording medium and method of manufacturing semiconductor device | Yukitomo HIROCHI, Kazuhiro Morimitsu, Taketoshi Sato, Tetsuo Yamamoto | 2016-11-22 |
| 9487863 | Substrate processing apparatus | Shun MATSUI, Kazuhiro Morimitsu | 2016-11-08 |
| 9431220 | Substrate processing apparatus and substrate processing system | Naofumi Ohashi, Masanori NAKAYAMA, Atsuhiko Suda, Shun MATSUI | 2016-08-30 |
| 9373499 | Batch-type remote plasma processing apparatus | Yasuhiro Inokuchi, Motonari Takebayashi, Tadashi Kontani, Nobuo Ishimaru | 2016-06-21 |