Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9487863 | Substrate processing apparatus | Kazuhiro Morimitsu, Kazuyuki Toyoda | 2016-11-08 |
| 9431220 | Substrate processing apparatus and substrate processing system | Naofumi Ohashi, Masanori NAKAYAMA, Atsuhiko Suda, Kazuyuki Toyoda | 2016-08-30 |
| 9402049 | Image processing apparatus and control method thereof | — | 2016-07-26 |