Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502236 | Substrate processing apparatus, non-transitory computer-readable recording medium and method of manufacturing semiconductor device | Yukitomo HIROCHI, Kazuyuki Toyoda, Taketoshi Sato, Tetsuo Yamamoto | 2016-11-22 |
| 9487863 | Substrate processing apparatus | Shun MATSUI, Kazuyuki Toyoda | 2016-11-08 |
| 9412582 | Reaction tube, substrate processing apparatus, and method of manufacturing semiconductor device | Takafumi Sasaki, Eisuke Nishitani, Tetsuo Yamamoto, Masanao Fukuda | 2016-08-09 |