Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502236 | Substrate processing apparatus, non-transitory computer-readable recording medium and method of manufacturing semiconductor device | Yukitomo HIROCHI, Kazuyuki Toyoda, Kazuhiro Morimitsu, Taketoshi Sato | 2016-11-22 |
| 9412582 | Reaction tube, substrate processing apparatus, and method of manufacturing semiconductor device | Takafumi Sasaki, Kazuhiro Morimitsu, Eisuke Nishitani, Masanao Fukuda | 2016-08-09 |