Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412582 | Reaction tube, substrate processing apparatus, and method of manufacturing semiconductor device | Takafumi Sasaki, Kazuhiro Morimitsu, Eisuke Nishitani, Tetsuo Yamamoto | 2016-08-09 |