Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412582 | Reaction tube, substrate processing apparatus, and method of manufacturing semiconductor device | Kazuhiro Morimitsu, Eisuke Nishitani, Tetsuo Yamamoto, Masanao Fukuda | 2016-08-09 |
| 9365928 | Substrate processing apparatus, method for manufacturing semiconductor device and computer-readable recording medium | Shuhei Saido, Yuichi Wada | 2016-06-14 |