Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502237 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Takatomo Yamaguchi | 2016-11-22 |
| 9365928 | Substrate processing apparatus, method for manufacturing semiconductor device and computer-readable recording medium | Yuichi Wada, Takafumi Sasaki | 2016-06-14 |