Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530677 | Substrate processing apparatus and semiconductor device manufacturing method | Akinori Tanaka, Daisuke Hara | 2016-12-27 |
| 9502237 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Shuhei Saido | 2016-11-22 |