Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9365928 | Substrate processing apparatus, method for manufacturing semiconductor device and computer-readable recording medium | Shuhei Saido, Takafumi Sasaki | 2016-06-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9365928 | Substrate processing apparatus, method for manufacturing semiconductor device and computer-readable recording medium | Shuhei Saido, Takafumi Sasaki | 2016-06-14 |