Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502236 | Substrate processing apparatus, non-transitory computer-readable recording medium and method of manufacturing semiconductor device | Kazuyuki Toyoda, Kazuhiro Morimitsu, Taketoshi Sato, Tetsuo Yamamoto | 2016-11-22 |