Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9484249 | Method of manufacturing semiconductor device | Satoshi Takano | 2016-11-01 |
| 9431220 | Substrate processing apparatus and substrate processing system | Masanori NAKAYAMA, Atsuhiko Suda, Kazuyuki Toyoda, Shun MATSUI | 2016-08-30 |
| 9396930 | Substrate processing apparatus | — | 2016-07-19 |
| 9355866 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Atsuhiko Suda, Satoshi Shimamoto | 2016-05-31 |