Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9431220 | Substrate processing apparatus and substrate processing system | Naofumi Ohashi, Masanori NAKAYAMA, Kazuyuki Toyoda, Shun MATSUI | 2016-08-30 |
| 9355866 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Satoshi Shimamoto, Naofumi Ohashi | 2016-05-31 |