Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9431220 | Substrate processing apparatus and substrate processing system | Naofumi Ohashi, Atsuhiko Suda, Kazuyuki Toyoda, Shun MATSUI | 2016-08-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9431220 | Substrate processing apparatus and substrate processing system | Naofumi Ohashi, Atsuhiko Suda, Kazuyuki Toyoda, Shun MATSUI | 2016-08-30 |