Issued Patents 2016
Showing 26–46 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9384972 | Method of manufacturing semiconductor device by forming a film on a substrate | Yushin Takasawa, Hajime Karasawa | 2016-07-05 |
| 9384971 | Method of manufacturing semiconductor device by forming a film on a substrate | Yushin Takasawa, Hajime Karasawa | 2016-07-05 |
| 9384970 | Method of manufacturing semiconductor device by forming a film on a substrate | Yushin Takasawa, Hajime Karasawa | 2016-07-05 |
| 9384969 | Method of manufacturing semiconductor device by forming a film on a substrate | Yushin Takasawa, Hajime Karasawa | 2016-07-05 |
| 9384968 | Method of manufacturing a semiconductor device by forming a film on a substrate | Yushin Takasawa, Hajime Karasawa | 2016-07-05 |
| 9384967 | Method of manufacturing a semiconductor device by forming a film on a substrate | Yushin Takasawa, Hajime Karasawa | 2016-07-05 |
| 9384966 | Method of manufacturing a semiconductor device by forming a film on a substrate | Yushin Takasawa, Hajime Karasawa | 2016-07-05 |
| 9378943 | Method of manufacturing semiconductor device, method of processing substrate substrate processing apparatus and non-transitory computer-readable recording medium | Yushin Takasawa, Tsukasa Kamakura, Yoshinobu Nakamura, Ryota Sasajima | 2016-06-28 |
| 9349587 | Method of manufacturing semiconductor device and method of processing substrate and substrate processing apparatus | Atsushi Sano, Kazuyuki Okuda, Kiyohiko Maeda | 2016-05-24 |
| 9349586 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium | Satoshi Shimamoto, Takaaki Noda, Takeo Hanashima, Hiroshi Ashihara, Tsukasa Kamakura +1 more | 2016-05-24 |
| 9343290 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Norikazu Mizuno, Kazutaka Yanagita, Shingo Okubo | 2016-05-17 |
| 9334567 | Method for manufacturing semiconductor device, method for processing substrate and substrate processing apparatus | Kenji Kanayama, Norikazu Mizuno, Yushin Takasawa, Yosuke Ota | 2016-05-10 |
| 9330904 | Method of manufacturing semiconductor device and substrate processing apparatus | Yushin Takasawa, Hajime Karasawa | 2016-05-03 |
| 9330903 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Atsushi Sano | 2016-05-03 |
| 9318316 | Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus for forming thin film containing at least two different elements | Yushin Takasawa, Hajime Karasawa | 2016-04-19 |
| 9312123 | Method of manufacturing semiconductor device and substrate processing apparatus | Yushin Takasawa, Hajime Karasawa | 2016-04-12 |
| 9281181 | Film forming method and recording medium for performing the method | Atsushi Sano | 2016-03-08 |
| 9269566 | Substrate processing apparatus | Naonori Akae, Yushin Takasawa, Yosuke Ota | 2016-02-23 |
| 9257275 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Sano | 2016-02-09 |
| 9245745 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and non-transitory computer-readable recording medium | Atsushi Sano | 2016-01-26 |
| 9234277 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Atsushi Sano | 2016-01-12 |