Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D773609 | Return nozzle | Shinya Morita, Masahiro Miyake, Naoki Matsumoto, Naonori Akae | 2016-12-06 |
| D771543 | Return nozzle | Shinya Morita, Masahiro Miyake, Naoki Matsumoto, Naonori Akae | 2016-11-15 |
| D771772 | Return nozzle | Shinya Morita, Masahiro Miyake, Naoki Matsumoto, Naonori Akae | 2016-11-15 |
| 9401272 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Naonori Akae, Hideki Horita | 2016-07-26 |