Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466468 | Shower head, plasma processing apparatus and plasma processing method | Koichi Kazama, Shuichiro Uda, Satoshi Yamada, Shinji Fuchigami | 2016-10-11 |
| 9263298 | Plasma etching apparatus and plasma etching method | Naoki Matsumoto, Kazuto Takai, Reika Ko | 2016-02-16 |