Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466468 | Shower head, plasma processing apparatus and plasma processing method | Nobuyuki Okayama, Koichi Kazama, Satoshi Yamada, Shinji Fuchigami | 2016-10-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466468 | Shower head, plasma processing apparatus and plasma processing method | Nobuyuki Okayama, Koichi Kazama, Satoshi Yamada, Shinji Fuchigami | 2016-10-11 |