Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502215 | Plasma processing apparatus and plasma processing method | Hitoshi Kato, Chishio Koshimizu, Jun Yamawaku, Yohei Yamazawa | 2016-11-22 |
| 9466483 | Film deposition apparatus and film deposition method | Hitoshi Kato | 2016-10-11 |
| 9376751 | Plasma processing device and operation method | Hitoshi Kato, Jun Sato, Takeshi Kobayashi, Masato Yonezawa | 2016-06-28 |