Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9500537 | Temperature measurement apparatus and method | Jun Abe, Chishio Koshimizu | 2016-11-22 |
| 9459159 | Heat-flux measuring method, substrate processing system, and heat-flux measuring member | Chishio Koshimizu | 2016-10-04 |
| 9412562 | Capacitive coupling plasma processing apparatus | Shinji Himori | 2016-08-09 |
| 9304050 | Temperature measurement apparatus and method | Jun Abe, Chishio Koshimizu | 2016-04-05 |