Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412562 | Capacitive coupling plasma processing apparatus | Tatsuo Matsudo | 2016-08-09 |
| 9390943 | Substrate processing apparatus | Kazuya Nagaseki, Etsuji Ito, Akihiro Yokota, Shoichiro Matsuyama | 2016-07-12 |
| 9275836 | Plasma processing apparatus and plasma processing method | — | 2016-03-01 |
| 9245776 | Plasma processing apparatus | Daisuke Hayashi, Akitaka Shimizu | 2016-01-26 |