Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9390943 | Substrate processing apparatus | Kazuya Nagaseki, Etsuji Ito, Akihiro Yokota, Shinji Himori | 2016-07-12 |
| 9230824 | Method of manufacturing semiconductor device | Wataru TAKAYAMA, Susumu Nogami, Daisuke Tamura, Kyosuke Hayashi, Jun Kawanobe | 2016-01-05 |