Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520267 | Bias voltage frequency controlled angular ion distribution in plasma processing | Ludovic Godet, Jun Xue, Prashanth Kothnur, Matthew D. Scotney-Castle | 2016-12-13 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520267 | Bias voltage frequency controlled angular ion distribution in plasma processing | Ludovic Godet, Jun Xue, Prashanth Kothnur, Matthew D. Scotney-Castle | 2016-12-13 |