Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9469712 | Method of producing polymeric compound, resist composition and method of forming resist pattern | Tomoyuki Hirano, Yoshiyuki Utsumi, Yoichi Hori | 2016-10-18 |
| 9411227 | Resist composition, method of forming resist pattern, compound, and polymeric compound | Takashi Nagamine, Masatoshi Arai, Yoshitaka Komuro | 2016-08-09 |
| 9405190 | Method for forming resist pattern and resist composition | Takayoshi Mori, Yusuke Suzuki | 2016-08-02 |
| 9274424 | Resist composition and resist pattern forming method | Tsuyoshi Nakamura, Kazuishi Tanno, Naoto Motoike, Yoichi Hori | 2016-03-01 |
| 9244347 | Resist composition, compound, polymeric compound and method of forming resist pattern | Yoshitaka Komuro, Takaaki Kaiho, Toshiaki Hato, Akiya Kawaue, Yoshiyuki Utsumi | 2016-01-26 |
| 9244357 | Method for forming resist pattern | Yuta Iwasawa, Kotaro Endo | 2016-01-26 |