Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9469712 | Method of producing polymeric compound, resist composition and method of forming resist pattern | Yoshiyuki Utsumi, Junichi Tsuchiya, Yoichi Hori | 2016-10-18 |
| 9341947 | Resist composition and method of forming resist pattern | Yoshitaka Komuro, Naoki Yamashita | 2016-05-17 |
| 9250531 | Method of forming resist pattern and negative tone-development resist composition | Daichi Takaki, Daiju Shiono, Kenri Konno, Isamu Takagi | 2016-02-02 |
| 9235123 | Resist composition and resist pattern forming method | Tsuyoshi Nakamura, Kazuishi Tanno, Naoto Motoike, Yoshitaka Komuro, Masatoshi Arai | 2016-01-12 |