Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9469712 | Method of producing polymeric compound, resist composition and method of forming resist pattern | Tomoyuki Hirano, Yoshiyuki Utsumi, Junichi Tsuchiya | 2016-10-18 |
| 9385243 | Semiconductor device | Takao Noda, Tsuyoshi Oota | 2016-07-05 |
| 9274424 | Resist composition and resist pattern forming method | Tsuyoshi Nakamura, Kazuishi Tanno, Naoto Motoike, Junichi Tsuchiya | 2016-03-01 |