Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9499646 | Negative resist composition, method of forming resist pattern and complex | Naoki Yamashita, Yoshitaka Komuro, Daiju Shiono | 2016-11-22 |
| 9469712 | Method of producing polymeric compound, resist composition and method of forming resist pattern | Tomoyuki Hirano, Junichi Tsuchiya, Yoichi Hori | 2016-10-18 |
| 9442371 | Method of producing structure containing phase-separated structure, method of forming pattern and method of forming fine pattern | Takehiro Seshimo, Takaya Maehashi, Takahiro Dazai, Tasuku Matsumiya, Ken Miyagi +2 more | 2016-09-13 |
| 9383642 | Polymerization method of high-molecular weight compound, resist composition, and method for forming resist pattern | Takahiro Dazai, Masatoshi Arai | 2016-07-05 |
| 9366960 | Negative resist composition, method of forming resist pattern, and complex | Naoki Yamashita, Yoshitaka Komuro, Daiju Shiono | 2016-06-14 |
| 9354515 | Resist composition, acid generator, polymeric compound and method of forming resist pattern | Takashi Nagamine, Yoshitaka Komuro, Masatoshi Arai | 2016-05-31 |
| 9244347 | Resist composition, compound, polymeric compound and method of forming resist pattern | Yoshitaka Komuro, Takaaki Kaiho, Toshiaki Hato, Akiya Kawaue, Junichi Tsuchiya | 2016-01-26 |