Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9442371 | Method of producing structure containing phase-separated structure, method of forming pattern and method of forming fine pattern | Takehiro Seshimo, Takaya Maehashi, Yoshiyuki Utsumi, Tasuku Matsumiya, Ken Miyagi +2 more | 2016-09-13 |
| 9383642 | Polymerization method of high-molecular weight compound, resist composition, and method for forming resist pattern | Masatoshi Arai, Yoshiyuki Utsumi | 2016-07-05 |