Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9411227 | Resist composition, method of forming resist pattern, compound, and polymeric compound | Takashi Nagamine, Junichi Tsuchiya, Yoshitaka Komuro | 2016-08-09 |
| 9383642 | Polymerization method of high-molecular weight compound, resist composition, and method for forming resist pattern | Takahiro Dazai, Yoshiyuki Utsumi | 2016-07-05 |
| 9379216 | Semiconductor device and method for manufacturing same | Tatsuya Nishiwaki, Yoshitaka Hokomoto | 2016-06-28 |
| 9354515 | Resist composition, acid generator, polymeric compound and method of forming resist pattern | Takashi Nagamine, Yoshitaka Komuro, Yoshiyuki Utsumi | 2016-05-31 |
| 9235123 | Resist composition and resist pattern forming method | Tsuyoshi Nakamura, Kazuishi Tanno, Naoto Motoike, Yoshitaka Komuro, Tomoyuki Hirano | 2016-01-12 |