Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9411227 | Resist composition, method of forming resist pattern, compound, and polymeric compound | Junichi Tsuchiya, Masatoshi Arai, Yoshitaka Komuro | 2016-08-09 |
| 9354515 | Resist composition, acid generator, polymeric compound and method of forming resist pattern | Yoshitaka Komuro, Masatoshi Arai, Yoshiyuki Utsumi | 2016-05-31 |