Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9499646 | Negative resist composition, method of forming resist pattern and complex | Naoki Yamashita, Yoshiyuki Utsumi, Daiju Shiono | 2016-11-22 |
| 9411227 | Resist composition, method of forming resist pattern, compound, and polymeric compound | Takashi Nagamine, Junichi Tsuchiya, Masatoshi Arai | 2016-08-09 |
| 9366960 | Negative resist composition, method of forming resist pattern, and complex | Naoki Yamashita, Yoshiyuki Utsumi, Daiju Shiono | 2016-06-14 |
| 9354515 | Resist composition, acid generator, polymeric compound and method of forming resist pattern | Takashi Nagamine, Masatoshi Arai, Yoshiyuki Utsumi | 2016-05-31 |
| 9341947 | Resist composition and method of forming resist pattern | Naoki Yamashita, Tomoyuki Hirano | 2016-05-17 |
| 9244347 | Resist composition, compound, polymeric compound and method of forming resist pattern | Takaaki Kaiho, Toshiaki Hato, Akiya Kawaue, Junichi Tsuchiya, Yoshiyuki Utsumi | 2016-01-26 |
| 9235123 | Resist composition and resist pattern forming method | Tsuyoshi Nakamura, Kazuishi Tanno, Naoto Motoike, Tomoyuki Hirano, Masatoshi Arai | 2016-01-12 |