Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9459535 | Method of forming pattern | Katsumi Ohmori, Toshiaki Hato, Hidetami Yaegashi, Kenichi Oyama | 2016-10-04 |
| 9274424 | Resist composition and resist pattern forming method | Tsuyoshi Nakamura, Kazuishi Tanno, Junichi Tsuchiya, Yoichi Hori | 2016-03-01 |
| 9235123 | Resist composition and resist pattern forming method | Tsuyoshi Nakamura, Kazuishi Tanno, Yoshitaka Komuro, Tomoyuki Hirano, Masatoshi Arai | 2016-01-12 |