Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9459535 | Method of forming pattern | Naoto Motoike, Katsumi Ohmori, Hidetami Yaegashi, Kenichi Oyama | 2016-10-04 |
| 9244347 | Resist composition, compound, polymeric compound and method of forming resist pattern | Yoshitaka Komuro, Takaaki Kaiho, Akiya Kawaue, Junichi Tsuchiya, Yoshiyuki Utsumi | 2016-01-26 |
| 9244349 | Positive resist composition and method of forming resist pattern | Takayoshi Mori | 2016-01-26 |