Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9499646 | Negative resist composition, method of forming resist pattern and complex | Naoki Yamashita, Yoshitaka Komuro, Yoshiyuki Utsumi | 2016-11-22 |
| 9475088 | Method of producing structure containing phase-separated structure, phase separated structure, and block copolymer composition | Tsuyoshi Kurosawa, Ken Miyagi, Tasuku Matsumiya, Kenichiro Miyashita, Katsumi Ohmori | 2016-10-25 |
| 9442371 | Method of producing structure containing phase-separated structure, method of forming pattern and method of forming fine pattern | Takehiro Seshimo, Takaya Maehashi, Takahiro Dazai, Yoshiyuki Utsumi, Tasuku Matsumiya +2 more | 2016-09-13 |
| 9366960 | Negative resist composition, method of forming resist pattern, and complex | Naoki Yamashita, Yoshitaka Komuro, Yoshiyuki Utsumi | 2016-06-14 |
| 9250531 | Method of forming resist pattern and negative tone-development resist composition | Tomoyuki Hirano, Daichi Takaki, Kenri Konno, Isamu Takagi | 2016-02-02 |