Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494860 | Resist composition, method of forming resist pattern | Kotaro Endo, Yuichi Suzuki, Yuta Iwasawa | 2016-11-15 |
| 9475088 | Method of producing structure containing phase-separated structure, phase separated structure, and block copolymer composition | Daiju Shiono, Ken Miyagi, Tasuku Matsumiya, Kenichiro Miyashita, Katsumi Ohmori | 2016-10-25 |
| 9442371 | Method of producing structure containing phase-separated structure, method of forming pattern and method of forming fine pattern | Takehiro Seshimo, Takaya Maehashi, Takahiro Dazai, Yoshiyuki Utsumi, Tasuku Matsumiya +2 more | 2016-09-13 |