Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9442371 | Method of producing structure containing phase-separated structure, method of forming pattern and method of forming fine pattern | Takehiro Seshimo, Takahiro Dazai, Yoshiyuki Utsumi, Tasuku Matsumiya, Ken Miyagi +2 more | 2016-09-13 |