Issued Patents 2005
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6939804 | Formation of composite tungsten films | Ken Kaung Lai, Jeong Soo Byun, Frederick Wu, Ramanujapuran A. Srinivas, Avgerinos V. Gelatos +7 more | 2005-09-06 |
| 6936906 | Integration of barrier layer and seed layer | Hua Chung, Ling Chen, Jick Yu | 2005-08-30 |
| 6932871 | Multi-station deposition apparatus and method | Lawrence Chung-Lai Lei, Walter Glenn | 2005-08-23 |
| 6933021 | Method of TiSiN deposition using a chemical vapor deposition (CVD) process | Jing-Pei (Connie) Chou, Chien-Teh Kao, Chiukin Lai, Roderick C. Mosely | 2005-08-23 |
| 6908865 | Method and apparatus for cleaning substrates | Martin Kranz, Srinivas Guggilla, Suraj Rengarajan, Gongda Yao, Nitin Khurana +1 more | 2005-06-21 |
| 6905541 | Method and apparatus of generating PDMAT precursor | Ling Chen, Vincent Ku, Hua Chung, Christophe Marcadal, Seshadri Ganguli +3 more | 2005-06-14 |
| 6849545 | System and method to form a composite film stack utilizing sequential deposition techniques | Alfred Mak, Jeong Soo Byun, Hua Chung, Ashok Sinha, Moris Kori | 2005-02-01 |