Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6932871 | Multi-station deposition apparatus and method | Mei Chang, Walter Glenn | 2005-08-23 |
| 6866746 | Clamshell and small volume chamber with fixed substrate support | Alfred Mak, Gwo-Chuan Tzu, Avi Tepman, Ming Xi, Walter Glenn | 2005-03-15 |
| 6855368 | Method and system for controlling the presence of fluorine in refractory metal layers | Moris Kori, Alfred Mak, Jeong Soo Byun, Hua Chung | 2005-02-15 |