Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6939804 | Formation of composite tungsten films | Ken Kaung Lai, Jeong Soo Byun, Frederick Wu, Ramanujapuran A. Srinivas, Avgerinos V. Gelatos +7 more | 2005-09-06 |
| 6872429 | Deposition of tungsten nitride using plasma pretreatment in a chemical vapor deposition chamber | Ling Chen, Seshadri Ganguli | 2005-03-29 |
| 6866746 | Clamshell and small volume chamber with fixed substrate support | Lawrence Chung-Lai Lei, Gwo-Chuan Tzu, Avi Tepman, Ming Xi, Walter Glenn | 2005-03-15 |
| 6855368 | Method and system for controlling the presence of fluorine in refractory metal layers | Moris Kori, Jeong Soo Byun, Lawrence Chung-Lai Lei, Hua Chung | 2005-02-15 |
| 6849545 | System and method to form a composite film stack utilizing sequential deposition techniques | Mei Chang, Jeong Soo Byun, Hua Chung, Ashok Sinha, Moris Kori | 2005-02-01 |