Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6953742 | Tantalum barrier layer for copper metallization | Ling Chen, Wei Cao, Christophe Marcadal | 2005-10-11 |
| 6905541 | Method and apparatus of generating PDMAT precursor | Ling Chen, Vincent Ku, Hua Chung, Christophe Marcadal, Jenny Lin +3 more | 2005-06-14 |
| 6872429 | Deposition of tungsten nitride using plasma pretreatment in a chemical vapor deposition chamber | Ling Chen, Alfred Mak | 2005-03-29 |