Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6974771 | Methods and apparatus for forming barrier layers in high aspect ratio vias | Fusen Chen, Ling Chen, Praburam Gopalraja, Jianming Fu | 2005-12-13 |
| 6932871 | Multi-station deposition apparatus and method | Mei Chang, Lawrence Chung-Lai Lei | 2005-08-23 |
| 6866746 | Clamshell and small volume chamber with fixed substrate support | Lawrence Chung-Lai Lei, Alfred Mak, Gwo-Chuan Tzu, Avi Tepman, Ming Xi | 2005-03-15 |