Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6939210 | Slurry delivery arm | Alexander S. Polyak | 2005-09-06 |
| 6935466 | Lift pin alignment and operation methods and apparatus | Dmitry Lubomirsky, Sheshraj Tulshibagwale, Donald Olgado | 2005-08-30 |
| 6881310 | Cooling system for magnetron sputtering apparatus | — | 2005-04-19 |
| 6866746 | Clamshell and small volume chamber with fixed substrate support | Lawrence Chung-Lai Lei, Alfred Mak, Gwo-Chuan Tzu, Ming Xi, Walter Glenn | 2005-03-15 |