Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6878206 | Lid assembly for a processing system to facilitate sequential deposition techniques | Salvador P. Umotoy | 2005-04-12 |
| 6866746 | Clamshell and small volume chamber with fixed substrate support | Lawrence Chung-Lai Lei, Alfred Mak, Avi Tepman, Ming Xi, Walter Glenn | 2005-03-15 |