Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6951804 | Formation of a tantalum-nitride layer | Sean M. Seutter, Michael Yang | 2005-10-04 |
| 6939804 | Formation of composite tungsten films | Ken Kaung Lai, Jeong Soo Byun, Frederick Wu, Ramanujapuran A. Srinivas, Avgerinos V. Gelatos +7 more | 2005-09-06 |
| 6911391 | Integration of titanium and titanium nitride layers | Michael Yang, Toshio Itoh | 2005-06-28 |
| 6866746 | Clamshell and small volume chamber with fixed substrate support | Lawrence Chung-Lai Lei, Alfred Mak, Gwo-Chuan Tzu, Avi Tepman, Walter Glenn | 2005-03-15 |
| 6846516 | Multiple precursor cyclical deposition system | Michael Yang, Hyungsuk Alexander Yoon, Hui Zhang, Hongbin Fang | 2005-01-25 |